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Senior engineer of the lithography module

Job Responsibilities

  • Responsible for SiC Diode/MOS Automotive and Industrial grade products qualification in relating to AEC-Q101 and JDEC standard.
  • Develop Unit Process for lithography (Track, exposure, etc) and further optimization of the recipe.
  • Support PIE to further improve Product yield and defect performance.
  • Process and Metrology Tools’ Qualification from Tier 2 to Tier 3.
  • Establishment Unit process capability by setting up SPC/APC/FDC to achieve CP/CpK >=1.33 minimum.
  • Carry out required DOE (Design of Experiment) on each TD platform’s Unit process to improve the overall Product specification margin.
  • Ability to complete the work delivered by the superiors independently.

Job Requirements

  • Bachelor's degree or above in microelectronics and semiconductor materials, with more than 5 years’ experience in lithography module in Si wafers processing, or 2 years’ experience in SiC direct products (JBS/MOS)
  • Familiar with each lithography single-step process (Track、Exposure、Oven、UV, etc.) and the production method.
  • Proficient development and learn lithography’s Tool fundamental and principles of lithography key assembly and components which can affect the process critical parameters.
  • Be familiar with the testing principles and methods of lithography testing related equipment (membrane thickness instrument, CDSEM, Overlay, etc.).
  • Have a team cooperation spirit, effective communication skills.
  • Innovative spirit
  • Good ability to organize, coordinate and manage teams.
  • Be proactive in work, be responsible.
  • Have an independent problem-solving ability.